TS Seal
Reduces twisting and migrating due to triangular "key-in" groove. Wide base reduces misalignment from shock and friction by 50%.
ARMOR CRYSTAL
High Purity
Low outgassing
Low metal impurity content
Low particle generation
Resistance to plasma
Low outgassing
Low metal impurity content
Low particle generation
Resistance to plasma
FLID / FLID ARMOR
Low surface friction
Abrasion resistant
Low adhesion to quartz (FLID)
Low adhesion to metals (FLID ARMOR)
Abrasion resistant
Low adhesion to quartz (FLID)
Low adhesion to metals (FLID ARMOR)
HYREC ARMOR
Heat resistance
Low adhesion
Low metal impurity content
Low particle generation
Resistance to plasma
Low adhesion
Low metal impurity content
Low particle generation
Resistance to plasma
ULTIC ARMOR
Excellent for dynamic sealing
Heat resistance
Low adhesion
Resistance to plasma
Low metal impurity content
Low particle generation
Heat resistance
Low adhesion
Resistance to plasma
Low metal impurity content
Low particle generation
SPOQ ARMOR
Excellent for dynamic sealing
Low adhesion
Low metal impurity content
Resistance to plasma
Low adhesion
Low metal impurity content
Resistance to plasma
