ULTIC ARMOR-F
High radical resistance
High anti-cracking ability
FKM with no fillers
Excellent mechanical properties for dynamic locations.
ARMOR CRYSTAL
High Purity
Low outgassing
Low metal impurity content
Low particle generation
Resistance to plasma
ULTIC ARMOR
Excellent for dynamic sealing
Heat resistance
Low adhesion
Resistance to plasma
Low metal impurity content
Low particle generation
HYREC ARMOR
Heat resistance
Low adhesion
Low metal impurity content
Low particle generation
Resistance to plasma
SPOQ ARMOR
Excellent for dynamic sealing
Low adhesion
Low metal impurity content
Resistance to plasma
LABE ARMOR
Heat resistant
Resistance to O2 plasma
Low adhesion
FLID / FLID ARMOR
Arcury Series offers improved resistance against harsh wet chemical and ozone conditions.
Low surface friction
Abrasion resistant
Low adhesion to quartz (FLID)
Low adhesion to metals (FLID ARMOR)
TS Seal
Reduces twisting and migrating due to triangular “key-in” groove. Wide base reduces misalignment from shock and friction by 50%.