For Chemicals
Wafer and glass substrate cleaning equipment, spin coaters, spin developers, chemical carrier tank seals
ARCURY AD
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Deep transparent amber
Excellent resistance to acids
Excellent purity (lowest extraction of metals and organics)
Excellent resistance to acids
Excellent purity (lowest extraction of metals and organics)
ARCURY AL
Black
Excellent resistance to alkali solvents including ammonia
Excellent resistance to alkali solvents including ammonia
ARCURY SO
White
Excellent resistance to polar organic solvents including ketone, ester and amine
Excellent resistance to polar organic solvents including ketone, ester and amine
For Ozone Environment
Ozone cleaning systems
Ozone generators ozone decomposition system
Ozone generators ozone decomposition system
ARCURY OZT
Clear, transparent
Excellent resistance to ozone gas and ozonic water
Excellent purity (lowest extraction of metals and organics)
Excellent resistance to ozone gas and ozonic water
Excellent purity (lowest extraction of metals and organics)
ARCURY OZW
White
Excellent resistance to ozone gas and ozone water Higher heat resistance
Excellent resistance to ozone gas and ozone water Higher heat resistance
